| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact objective lens which has a capability for correcting chromatic aberration, a large numerical aperture and less degradation of performance. SOLUTION: A first imaging optical system G1 for forming an intermediate image is constituted of a meniscus lens L1 having positive power sequentially increased from the object side, a second optical element LM2 having a double convex shape, a concave reflection mirror on a backside and positive power, a first optical element LM1 having a meniscus shape, a concave reflection mirror on a backside and negative power, a double concave lens L2, a meniscus lens L3 as a pair of separate tablets having negative power and a double convex lens L4. A second imaging optical system G2 for forming a secondary image is constituted of a double convex lens L5 as a second pair of separate tablets from the intermediate image side, a meniscus lens L6 having negative power, a double convex lens L7, a meniscus lens L8 having negative power and a double convex lens L9. COPYRIGHT: (C)2003,JPO
|
