| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL element structure together with its manufacturing method which is of high precision and brightness. SOLUTION: An organic EL element comprises a diffraction lattice which sandwiching an organic thin-film layer of single ply or a plurality of plies between an anode 30 and a cathode 50. The area of diffraction lattice disposed to each light-emitting pixel is larger than the area of the light-emitting pixel. The manufacturing process of the EL element includes a process in which a photomask which decides position and size of the diffraction lattice in a substrate is installed at a position on the surface of photosensitive material where no laser non-interference exposure part is formed, a process where the photosensitive material is exposed by a two-beam laser interference exposure system, and a process where the substrate or the thin film formed on the substrate is etched to provide a diffraction lattice. COPYRIGHT: (C)2003,JPO
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