摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize optimum device characteristics in response to various applications by differentiating mechanical characteristics and electrical characteristics or the like at an actual operating part and other part. <P>SOLUTION: The piezoelectric/electrostrictive device 10 comprises piezoelectric/electrostrictive elements 18a and 18b constituted by sandwiching a piezoelectric/electrostrictive layer 22 between the one electrode 24 and the other electrode 26 in which one electrode 24 and the other electrode 26 are laminated in a zigzag manner so as to be in a pectinated section on a ceramic base 16 having thin plates 12a and 12b, movable parts 20a and 20b, and fixed part 14. In this device 10, a first layer piezoelectric/electrostrictive layer 22A has a first part 22A1 of a first piezoelectric/electrostrictive material formed on a part from a part of the thin plate 12a to a part of the fixed part 14, and a second part 22A2 of a second piezoelectric/electrostrictive material formed on the part of the fixed part 14. <P>COPYRIGHT: (C)2003,JPO</p> |