OPTICAL SYSTEM HAVING MULTIPLE OPTICAL ELEMENTS

摘要

PROBLEM TO BE SOLVED: To provide an optical system enabling high precision measurement and a high precision adjustment of the position of each element to be performed in the optical system, and a method of changing positions of an object and an image in the optical system. SOLUTION: The optical system having a plurality of optical elements, in particular, an exposure lens for use in semiconductor lithography has at least one load-dissipating structure. The load-dissipating structure converts a force resulting from the optical element. Further, the optical element comprises a measuring mechanism which is assembled independently from at least the one load-dissipating structure. COPYRIGHT: (C)2003,JPO