| 摘要 |
PROBLEM TO BE SOLVED: To provide a focusing controller that can make quick focus jumping from the first layer to the third layer. SOLUTION: After the controller is switched to an accelerator, the acceleration stop timing is detected from the first layer based on the output of an acceleration time comparator and a signal detector. Then switching to acceleration stop circuit, it obtains deceleration timing to the second layer based on the output of the signal detector. The focusing timing to the second layer is detected based on the output of the signal detector and the RF signal amplitude detector. Acceleration stop timing is detected from the second layer based on the output of the signal detector. Deceleration start timing to the third layer is detected based on the signal detector. Then switching to the deceleration circuit, it switches the deceleration circuit of the signal generator to the signal generator based on the output of the signal detector and the RF signal amplitude detector. COPYRIGHT: (C)2003,JPO
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