摘要 |
<p><P>PROBLEM TO BE SOLVED: To significantly decrease the diameter of an O-ring which is attached to the outer peripheral surface of a cylindrical shutter when compared with the inside diameter of a shutter attaching hole. <P>SOLUTION: An X-ray analysis device is provided with a block 4 provided with an X-ray irradiation hole 4d through which the X-ray emitted from an X-ray tube 7 is radiated to a sample S and a cylindrical shutter attaching hole 4f which is larger in diameter than the X-ray irradiation hole 4d and is formed across it. It comprises a shutter 10 provided with a cylindrical small-diameter part 15g which is rotatably attached to the shutter attaching hole 4f and is also rotatable between a communication position which allows the X-ray passing the X-ray irradiation hole 4d to be projected on the sample S and a shielding position to block passage of the X-ray, with a ring-like groove 15h formed where an O-ring 16 is attached to the outer peripheral surface of the small- diameter part 15g. It also comprises a cylindrical air-tightness keeping member 26 which has an inside peripheral surface with which the O-ring 16 at the outer peripheral surface of the small-diameter part 15g engages rotatably and an outer peripheral surface which is held, in air-tight manner, by the shutter attaching hole 4f. <P>COPYRIGHT: (C)2003,JPO</p> |