| 摘要 |
PROBLEM TO BE SOLVED: To reduce unevenness in thickness of the film of an energy ray- sensitive resin. SOLUTION: The production method of an information recording carrier comprises at least an etching process in which the surface of a planarized substrate is etched with a fine powder-containing solution, a cleaning process in which the surface of the substrate etched in the etching process is cleaned, a lipophilicity-imparting process in which the surface of the substrate cleaned in the cleaning process is lipophilized and a process in which the energy ray- sensitive resin is applied to the surface of the substrate lipophilized in the lipophilicity-imparting process. In addition, in the etching process, the weight of critical fine powder and the flow rate of a critical aqueous solution are computed by referring to the thickness of the film of the energy ray-sensitive resin, and the etching is carried out applying the weight of fine powder which is at least the weight of the critical fine powder and the flow rate of an aqueous solution which is at least the flow rate of the critical aqueous solution. COPYRIGHT: (C)2003,JPO |
