| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an analyzer of a curved surface testpiece enabling a focus of a probe to follow a surface of a testpiece with an arbitrary curved face. <P>SOLUTION: The analyzer to analyze the surface of the testpiece comprises height measuring means 8 to 12 measuring heights of a plurality of points on the surface of the testpiece, an inclination operation means 16 that divides a region from aggregation of each point measured by the measuring means to find each inclination at each divided region on the surface of the testpiece, and a testpiece stage driving means 13 that drives the stage 14 of the testpiece 2 following the inclination of each region determined by the inclination operation means. Values of (z) axes of the multiple points are input in the region of the surface analysis, and sections are divided from a Delaunay diagram to divide into a polygon accurately representing irregularities of the testpiece 2, and to measure as aggregation of straight lines and the surface is analyzed according to the irregularities of the testpiece 2. <P>COPYRIGHT: (C)2003,JPO</p> |
