| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for testing semiconductor integrated circuits capable of measuring the frequency characteristics of the power current of an object to be measured at any timing regardless of whether a test pattern is impressed onto the object to be measured or not. SOLUTION: A pattern generator 18 generates the test pattern to be impressed onto a device to be measured 30, and brings an RS flip-flop 19 into a set state while the test pattern is generated. A timing generator 16 brings an RS flip-flop 17 into a set state at any timing set by a processing unit 10 for control. The output ends of the RS flip-flops 17 and 19 are connected to the input end of an OR circuit 20, and the output end of the OR circuit 20 is connected to an AND circuit 22. Therefore, it is possible to supply a sampling clock CLK2 for an A/D converter 13 at any timing and to sample a detection signal S1 of a current detecting circuit 12. COPYRIGHT: (C)2003,JPO
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