| 摘要 |
PROBLEM TO BE SOLVED: To make a dual arrangement of elements realizable by reducing substrate stress without increasing the size of the elements or their mounting area. SOLUTION: Then film magnetic cores made of one strip-shaped magnetic body or obtained by electrically connecting two strip-shaped magnetic bodies or more to each other are formed on the both front and back surfaces of a glass substrate 12, (the film magnetic core on the upper surface is indicated with a mark 11a, the film magnetic core on the lower surface is with a mark 11b, and conductor for electrically connecting the two strip-shaped magnetic bodies or more are with a mark 13 in Fig.). It is possible to eliminate substrate distortion due to residual stress associated with sputtering after film formation. By making detecting distances of magnetic fields approximately the same between the film magnetic cores, corrections on differences in arrangement locations are made unnecesser. COPYRIGHT: (C)2003,JPO
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