| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an abnormal bubble warning device using a diaphragm pump or any other pump to flow a liquid and make various processes, which can issue a warning before the pump, piping, etc., will severely be damaged or issue a warning against an abnormality of the liquid. <P>SOLUTION: In the device, a detecting section through which the liquid flows is provided with a detecting sensor 3 counting bubbles. Under the normal condition, a reference count value of bubbles in the abnormal state is set on CPU based on a normal count value of the normal state bubbles generated in the liquid within a specified time. The number of bubbles counted by the detecting sensor within a prescribed time is updated for each specified time. If a pin hole or abnormality in the liquid comes to continuously generate numerous bubbles, the number of output counts will continuously exceed the reference count value beyond the specified time, therefore a warning for abnormal bubble generation is issued. Additionally operation of the pump may be stopped. <P>COPYRIGHT: (C)2003,JPO</p> |
