| 摘要 |
PROBLEM TO BE SOLVED: To obtain an inexpensive electrostatic actuator having the sufficient power of generation without impairing mass productivity. SOLUTION: First and second stators 12, 13 are disposed so as to oppose each other, and a mover 11 is disposed between the stators so as to freely move in a prescribed direction. Electrode groups, wherein stator electrodes having the same widths are sequentially disposed at almost the same pitches, are arranged. First and second voltage signal patterns having different timings are applied to the stator electrodes of the electrode groups, and either of the first and second patterns is set as an drive signal when the mover is driven by the other pattern in the prescribed direction. COPYRIGHT: (C)2003,JPO
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