| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure governing device which is made high in performance by improving responsiveness in a pressure sensing part. SOLUTION: A buffering part 58 consisting of an elastic material such as rubber with elasticity is arranged in the opening 56A of an adjustment screw 56 inside an atmosphere communication chamber 53. A ventilation hole 58a of a cross shape cut is formed in the buffering part 58. When pressure is changed in the chamber 53 due to the displacement of a diaphragm 51, etc., air goes in and out via the ventilation holes 58a, 53a and 57a. In this case, a ventilation area is changed in the ventilation hole 58a in response to a ventilation flow rate and also a vibration generated when the air passes through the hole 58a is absorbed. Besides, since the ventilation area of the ventilation hole 53a is adjusted by the screwing amount of a ventilation hole adjustment screw 60 onto a cover 50A, it is possible to flexible deal with the situation even when a piping condition, etc., is changed on the side of the exit 22b of a flow path 22. COPYRIGHT: (C)2003,JPO
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