| 摘要 |
PROBLEM TO BE SOLVED: To prevent yield lowering due to dust produced from a deposited matter of the inside of a vacuum chamber of a semiconductor manufacturing device. SOLUTION: When light is introduced and taken in onto a transmission member by using an optical fiber, it is attached through an adapter for condensing light. Each face of the adapter attaching the optical fiber and the transmission member is an equal area to each cross section. Determination or the like of a cleaning period of the deposited matter accompanying releasing of atmospheric air facilitates since a composition of the deposited matter of the inside of the vacuum chamber and a relative film thickness can be analyzed by being attached to the semiconductor manufacturing device by using the adapter making light amount loss the minimum, and productivity of a semiconductor device can be improved. COPYRIGHT: (C)2003,JPO |
