| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing apparatus that does not require the exchange of a dual-objective microscope used for work alignment even when the size of work changes. SOLUTION: In a dicing apparatus 10 comprising a dual-objective microscope 12 used for alignment of a work W, the dual-objective microscope 12 is formed of a first microscope 12A and a second microscope 12B, the first microscope 12A is fixed in the direction of an X axis and the second microscope 12B is supported so as to be movable in the direction of the X axis so that the distance between the optical axes of the objectives of the microscopes can be adjusted to an arbitrary distance, and the exchange of the dual-objective microscope 12 is not required even when the size of the work changes. COPYRIGHT: (C)2003,JPO |
