摘要 |
PROBLEM TO BE SOLVED: To manufacture a wiring board for an organic EL element at good productivity and low cost. SOLUTION: A transparent conductive film 1 is formed on a glass substrate 10. Then using a shadow mask, metal films 2A and 2B are formed, while a region in which no metal film 2A and 2B are formed is provided on the substrate surface. Photoresists 3A and 3B are applied to form a prescribed electrode pattern. The transparent film 1 and the metal films 2A and 2B are simultaneously patterned by a one-time photolithography. Thus, a 2-ply conductive wiring which can be used as a matrix electrode is formed. COPYRIGHT: (C)2003,JPO
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