HIGH TEMPERATURE PROCESSING COMPATIBLE METAL GATE ELECTRODE FOR PFETS AND METHOD FOR FABRICATION

摘要

A method for fabricating a CMOS gate electrode by using Re, Rh, Pt, Ir or Ru metal and a CMOS structure that contains such gate electrodes are described. The work functions of these metals make them compatible with current pFET requirements. For instance, the metal can withstand the high hydrogen pressures necessary to produce properly passivated interfaces without undergoing chemical changes. The thermal stability of the metal on dielectric layers such as SiO2, Al2O3 and other suitable dielectric materials makes it compatible with post-processing temperatures up to 1000 °C. A low temperature/low pressure CVD technique with Re2 (CO)10 as the source material is used when Re is to be deposited.