BURNER FOR A VAPOUR DEPOSITION PROCESS

摘要

A burner (1) for a vapour deposition process has a cylindrical central gas passage (100) and a plurality of external gas passages (200, 300, 400) surrounding the central gas passage (100), and comprises a back block (2) defining an initial section of said gas passages, a face block (3) defining a final section of said gas passages and a manifold plate (4) positioned between the back block and the face block and defining an intermediate section of said external gas passages; the face block, the manifold plate and the back block comprise inner integral walls that define respective sections of the central gas passage.