首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
Verfahren und Vorrichtung zur Reinigung eines Plasmareaktors
摘要
申请公布号
DE69623731(T2)
申请公布日期
2003.06.05
申请号
DE1996623731T
申请日期
1996.12.03
申请人
APPLIED MATERIALS, INC.
发明人
YE, YAN;HANAWA, HIROJI;MA, DIANA XIAOBING;YIN, GERALD ZHEYAO
分类号
H05H1/46;H01J37/32;H01L21/00;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Command-curable composition.
Dental implant.
FIBROBLAST GROWTH FACTOR (FGF)-BASED STABILIZED COMPOSITIONS.
Filtering device for blood platelet.
Television receiver having multi-image display capability.
Use of angiostatic steroids in the manufacture of a medicament for controlling ocular hypertension.
Safety arrangement for overhead luggage bins in aircraft passenger cabins.
Suction apparatus.
Transformed Shigella.
IC socket.
Method of detecting a biological substance using ligands.
Device for a dishwasher.
Method and apparatus for simulating analog display in digital display test instrument.
ARTICLE WITH MOISTURE-INSENSITIVE OXYGEN BARRIER PROPERTIES.
Method and apparatus for spectral analysis with high resolution of non stationary signals from an electromagnetic detection system.
Contact structure in socket with IC carrier placed thereon.
Thermoreversible recording medium, apparatus utilizing the same and method for fabricating the same.
Improvements in or relating to clamps and connectors
Fluid dispensing unit with metered outflow
Ventilator
