发明名称 |
Surface inspection system |
摘要 |
A surface inspection system for projecting a laser beam to a surface of a substrate and for detecting a foreign object by detecting scattered reflection light of the laser beam, comprising a light source unit having a plurality of light emitting sources for emitting the laser beams, and a projecting optical system for projecting the laser beam from each of the light emitting sources to the surface of the substrate.
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申请公布号 |
US2003103203(A1) |
申请公布日期 |
2003.06.05 |
申请号 |
US20020252763 |
申请日期 |
2002.09.23 |
申请人 |
ISOZAKI HISASHI;ENOMOTO YOSHIYUKI |
发明人 |
ISOZAKI HISASHI;ENOMOTO YOSHIYUKI |
分类号 |
H01L21/66;G01N21/95;(IPC1-7):G01N21/88 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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