IDENTIFICATION CODE READER INTEGRATED WITH SUBSTRATE CARRIER ROBOT

摘要

An ID code reader, adapted to read an ID code from a wafer cassette or other substrate carrier, is integrated with a substrate carrier handling robot. In one aspect, the robot includes a support structure, and a chassis mounted for movement on the support structure. In this aspect an ID code reader is mounted on the chassis or otherwise mounted for movement along with an end effector adapted to engage the substrate carrier.