摘要 |
A miniature electrofluidic module is disclosed, for receiving one or more fluids and for receiving an electrical connection. In accordance with one aspect of the invention, the module includes a substantially flat fluidic manifold layer for fluid distribution, a substantially flat electrical layer including an electrical circuit, and a substantially flat device layer including micromachined devices. The devices may include electrically actuated valves for modulating the flow of fluids. In another aspect of the invention, an electrofluidic module is combined with an electrofluidic circuit board. In a further aspect, an electrofluidic system such as a dialysate handling system is disclosed, including a fluidic fixture and an electrofluidic assembly incorporating electrofluidic devices. In a still further aspect of the invention, a method is disclosed for interfacing micromachined devices to electrical and fluidic interfaces on a fixture, including packaging the devices into a module and providing electrical and fluidic interfaces between the module and the fixture. |