OPTICAL DISPLACEMENT SENSOR

摘要

This invention relates to an optical displacement sensor element, e.g. for u se in a pressure sensor or a microphone, comprising two essentially flat surfac es being separated by a cavity being defined by a spacer, the distance between the surfaces being variable thus providing a displacement sensitive Fabry- Perot interferometer. Both of said surfaces are at least partially reflectiv e, and in that said first surface is provided with at least one optical detecto r, and one of surfaces being provided on an at least partially transparent material.