VACUUM-COATING FACILITY FOR COATING WEB MATERIAL

摘要

The invention relates to a vacuum-coating facility for coating web material (6) in processing chambers, wherein an unwinding device (4) having a first roller frame (11) is arranged in a first evacuatable winder chamber (2) and a winding device (5) having a second roller frame (12) is arranged in a second evacuatable winder chamber (3), wherein the web material runs through at least one evacuatable processing chamber (1) between said devices, wherein a cooling roller (15, 16) is arranged in a processing roller frame (14) having guiding devices for the web material, wherein at least one magnetron sputter source (17) is located on the surface thereof. The invention has the aim of enhancing precision in the parallelism of all rollers involved in the process. This is achieved in that the unwinding roller frame, the process roller frame and the winding roller frame are fixed in given points (18, 19, 20, 21) and in that the maximum difference in pressure between a winder chamber and the processing chamber is 50 Pa when the facility is operating and/or a common roller frame is configured for several cooling rollers.