发明名称 SOI semiconductor device and method of manufacturing the same
摘要 A semiconductor device comprising a source region, a drain region, and a buried insulating film. The buried insulating film is composed of a first part lying below the source and drain region, and a second part lying below the space between the source and drain regions. The first part of the buried insulating film is thicker than the second part. The bottoms of the source and drain regions contact the first part of the buried insulating film.
申请公布号 US2003102499(A1) 申请公布日期 2003.06.05
申请号 US20020287508 申请日期 2002.11.05
申请人 FUJIWARA MAKOTO 发明人 FUJIWARA MAKOTO
分类号 H01L21/336;H01L29/45;H01L29/786;(IPC1-7):H01L29/76 主分类号 H01L21/336
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