发明名称 |
Column simultaneously focusing a particle beam and an optical beam |
摘要 |
The invention concerns a column for producing a focused particle beam comprising: a device (100) focusing particles including an output electrode (130) with an output hole (131) for allowing through a particle beam (A); an optical focusing device (200) for simultaneously focusing an optical beam (F) including an output aperture (230). The invention is characterised in that said output aperture (230) is transparent to the optical beam (F), while said output electrode (130) is formed by a metallic insert (130) maintained in said aperture (230) and bored with a central hole (131) forming said out-put orifice.
|
申请公布号 |
US2003102436(A1) |
申请公布日期 |
2003.06.05 |
申请号 |
US20030239293 |
申请日期 |
2003.01.13 |
申请人 |
|
发明人 |
BENAS-SAYAG GERARD;BOUCHET PATRICK;CORBIN ANTOINE;SUDRAUD PIERRE |
分类号 |
H01J37/22;(IPC1-7):H01J3/14 |
主分类号 |
H01J37/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|