METHOD FOR PRODUCING A SEMICONDUCTOR COMPONENT HAVING A MOVABLE MASS IN PARTICULAR, AND SEMICONDUCTOR COMPONENT PRODUCED ACCORDING TO THIS METHOD

摘要

The invention relates to a method for producing a semiconductor component (330; 400; 500; 600; 700; 800; 900; 1000; 1100) such as especially, a multiple layer semiconductor component, having a movable mass or an oscillator structure (501, 502; 701, 702), of the type described in the corresponding independent patent claim; and to a semiconductor component produced according to this method. The aim of the invention is to provide a simple and economical means of producing a micromechanical component with monocrystalline oscillator structures (501, 502; 601, 702) such as especially, an acceleration sensor or a rotation rate sensor, in the field of surface micromechanics. To this end, the inventive method provides that in a first step, a first porous layer (301; 901) is formed in the semiconductor component and in a second step, a cavity or a cavern (302; 1101) is formed in the semiconductor component, beneath or from the first porous layer (301).