A fluid delivery system includes a flow control device and a Coriolis mass flowmeter112 in fluid communication with the flow control device.110.The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller 114provides a control output signal to the flow control device110, which may comprise a pinch valve120, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.112.
申请公布号
WO03046489(A1)
申请公布日期
2003.06.05
申请号
WO2002US37778
申请日期
2002.11.25
申请人
EMERSON ELECTRIC CO.;SUND, WESLEY, E.;DILLE, JOSEPH, C.;BARGER, MICHAEL, J.;PAWLAS, GARY, E.
发明人
SUND, WESLEY, E.;DILLE, JOSEPH, C.;BARGER, MICHAEL, J.;PAWLAS, GARY, E.