发明名称 |
Microfabricated acoustic transducer with suppressed substrate modes |
摘要 |
The present invention provides a microfabricated acoustic transducer with suppressed substrate modes. The modes are suppressed by either thinning the substrate such that a longitudinal ringing mode occurs outside of the frequency band of interest or by applying a judiciously designed damping material on the backside of the transducer substrate.
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申请公布号 |
US2003103412(A1) |
申请公布日期 |
2003.06.05 |
申请号 |
US20020280317 |
申请日期 |
2002.10.25 |
申请人 |
LADABAUM IGAL;WAGNER PAUL A. |
发明人 |
LADABAUM IGAL;WAGNER PAUL A. |
分类号 |
B06B1/02;B06B1/06;(IPC1-7):H04R17/00 |
主分类号 |
B06B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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