发明名称 |
THICK POROUS ANODIC ALUMINA FILMS AND NANOWIRE ARRAYS GROWN ON A SOLID SUBSTRATE |
摘要 |
The presently disclosed invention provides for the fabrication of porous anodic alumina (PAA) films on a wide variety of substrates. The substrate comprises a wafer layer and may further include an adhesion layer deposited on the wafer layer. An anodic alumina template is formed on the substrate. When a rigid substrate such as Si is used, the resulting anodic alumina film is more tractable, easily grown on extensive areas in a uniform manner, and manipulated without danger of cracking. The substrate can be manipulated to obtain free-standing alumina templates of high optical quality and substantially flat surfaces. PAA films can also be grown this way on patterned and non-planar surfaces. Furthermore, under certain conditions the resulting PAA is missing the barrier layer (partially or completely) and the bottom of the pores can be readily accessed electrically. |
申请公布号 |
WO03046265(A2) |
申请公布日期 |
2003.06.05 |
申请号 |
WO2002US37732 |
申请日期 |
2002.11.25 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
RABIN, ODED;HERZ, PAUL, R.;DRESSELHAUS, MILDRED, S.;AKINWANDE, AKINTUNDE, IBITAYO;LIN, YU-MING |
分类号 |
C30B7/00;H01L35/32;H01L35/34 |
主分类号 |
C30B7/00 |
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