发明名称 HIGH PURITY CORIOLIS MASS FLOW CONTROLLER
摘要 <p>A mass flow measurement and control device (100) includes an enclosure (101) with a Coriolis mass flowmeter (50, 112) situated therein. The Coriolis mass flowmeter (50, 112) has a flow-tube made of a high-purity plastic material, a driver (D) coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube (52). A pinch valve (110, 120) includes an elastomeric tube (126) made of a high-purity plastic material in fluid communication with the flow tube. An actuator (122) with a ram (124) operatively connected thereto is situated adjacent to the elastomeric tube (126), and a reference surface (128) is positioned generally opposite the ram such that the elastomeric tube is squeezable between the ram and the reference surface. A controller (114) may also be provided, which receives an output signal from the Coriolis flowmeter (50, 112) and provides a control output signal to the pinch valve actuator (112) in response to the flowmeter output signal and a setpoint signal.</p>
申请公布号 WO2003046675(A1) 申请公布日期 2003.06.05
申请号 US2002037791 申请日期 2002.11.25
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