发明名称 STORAGE DEVICE
摘要 The invention relates to a storage device (61) disposed in a clean room for storing product containers (2) for receiving wafers used in the production of semiconductors. The inventive storage device (61) is connected to an in-house transport system for the product containers (2). In order to utilize so far non-utilized zones of the clean room for the purpose of storage, thereby reducing capital cost and overhead expenses of semiconductor production, the storage device (61) is disposed below the ceiling of the clean room.
申请公布号 WO03046954(A2) 申请公布日期 2003.06.05
申请号 WO2002DE04277 申请日期 2002.11.21
申请人 ORTNER C.L.S. GMBH;BUDACH, KARSTEN;ESSER, HEINZ, MARTIN;JARNIG, HUBERT 发明人 BUDACH, KARSTEN;ESSER, HEINZ, MARTIN;JARNIG, HUBERT
分类号 H01L21/00;H01L21/677 主分类号 H01L21/00
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