Process and apparatus for depositing titanium layers,申请号EP19980300508-传众专利搜索

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发明名称	Process and apparatus for depositing titanium layers
摘要
申请公布号	EP0855452(B1)	申请公布日期	2003.06.04
申请号	EP19980300508	申请日期	1998.01.26
申请人	APPLIED MATERIALS, INC.	发明人	ZHAO, JUN;LUO, LEE;LIANG, XIAO JIN;WANG, JIA-XIANG;WOLFF, STEFAN;SAJOTO, TALEX
分类号	C23C14/54;C23C16/14;C23C16/44;C23C16/458;C23C16/50;C23C16/511;C23C16/52;H01J37/32;H01L21/28;H01L21/285;H01L21/3205;(IPC1-7):C23C16/44	主分类号	C23C14/54
代理机构		代理人
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