| 摘要 |
First and second stationary members (12, 13) are arranged to face each other, and a movable member (11) is arranged between these first and second stationary members (12, 13) so as to be movable in a predetermined direction (21). An electrode groups including a plurality of stationary electrodes (12a, 12b, 12c, 12d, 13e, 13f, 13g, 13h) having the same width (W) and sequentially arranged at substantially the same pitch (Ph) in a predetermined direction (21) is formed on each of these stationary electrodes (12, 13). Also, a movable electrode having a width (L) in the predetermined direction (21), which is larger than the width (W) of each of the stationary electrodes (12a, 12b, 12c, 12d, 13e, 13f, 13g, 13h) constituting the electrode group, is arranged on the movable member (11). First and second voltage signal patterns differing from each other in the timing are applied to the stationary electrodes constituting the electrode group. When the movable member (11) is driven in the predetermined direction (21) by one of the first and second voltage signal patterns, the voltage signal pattern serving to drive the movable member (11) is determined as the driving signal. <IMAGE> |
