发明名称 Gas preheater and process for controlling distribution of preheated reactive gas in a CVI furnace for densification of porous annular substrates
摘要 A gas preheater for a CVI furnace designed for the densification of annular porous substrates arranged in a plurality of vertical annular stacks of substrates, comprising: a sleeve made of heat conductive material resting upon the bottom wall of a susceptor and delimiting a gas preheating chamber, with a gas inlet opening in the gas preheating chamber; a heat exchange assembly located in the gas preheating chamber; a gas distribution plate resting upon the sleeve, covering the gas preheating chamber and provided with a plurality of passages for preheated gas; a load supporting plate for supporting stacks of annular substrates and provided with a plurality of passages in communication with respective passages of the gas distribution plate and registration with internal volumes of respective stacks of annular substrates; and nozzles inserted in passages communicating the gas preheating zone with the internal volumes of respective stacks of annular substrates for adjusting the flows of preheated gas respectively admitted in said internal volumes.
申请公布号 US6572371(B1) 申请公布日期 2003.06.03
申请号 US20020139553 申请日期 2002.05.06
申请人 MESSIER-BUGATTI 发明人 SION ERIC;BAUDRY YVAN
分类号 C23C16/452;C23C16/04;C23C16/26;(IPC1-7):F27D1/10 主分类号 C23C16/452
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