| 摘要 |
PROBLEM TO BE SOLVED: To enhance the accuracy in measurement, as regards the method of measuring a thrust constant and a thrust ripple which decide the performance of a linear motor to drive a stage. SOLUTION: A linear motor being the target of measurement is coupled, as a slave linear motor 11, with a master linear motor 13 through a noncontact stage mechanism 12, and velocity inducing voltage generated in each phase in the slave linear motor at operation of the master linear motor is measured, and an induced voltage constant in every phase is obtained from the ratio of the velocity induced voltage in each phase measured to the shifting velocity, and an estimated constant and an estimated ripple are measured from there. |
