发明名称 |
Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site |
摘要 |
A high-speed method and system for precisely positioning a waist of a material-processing laser beam to dynamically compensate for local variations in height of microstructures located on a plurality of objects spaced apart within a laser-processing site are provided. In the preferred embodiment, the microstructures are a plurality of conductive lines formed on a plurality of memory dice of a semiconductor wafer. The system includes a focusing lens subsystem for focusing a laser beam along an optical axis substantially orthogonal to a plane, an x-y stage for moving the wafer in the plane, and a first air bearing sled for moving the focusing lens subsystem along the optical axis. |
申请公布号 |
US6573473(B2) |
申请公布日期 |
2003.06.03 |
申请号 |
US20010001104 |
申请日期 |
2001.11.02 |
申请人 |
GENERAL SCANNING INC. |
发明人 |
HUNTER BRADLEY L.;CAHILL STEVEN P.;EHRMANN JONATHAN S.;PLOTKIN MICHAEL |
分类号 |
B23K26/04;B23K26/08;B23K101/40;G03F7/20;H01L21/82;(IPC1-7):B23K26/02 |
主分类号 |
B23K26/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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