| 发明名称 |
Semiconductor wafer support lift-pin assembly |
| 摘要 |
A modular lift-pin assembly comprises a lift-pin having a distal end and a connector having a lift-pin end and an actuator end. The lift-pin end of the connector is coupled to the distal end of the lift-pin and an actuator pin is then coupled to the actuator end of the connector to actuate the lift-pin through the connector.
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| 申请公布号 |
US6572708(B2) |
申请公布日期 |
2003.06.03 |
| 申请号 |
US20010797214 |
申请日期 |
2001.02.28 |
| 申请人 |
APPLIED MATERIALS INC. |
发明人 |
GUJER RUDOLF;CHO THOMAS K.;PANG LILY L.;KARAZIM MICHAEL P.;ISHIKAWA TETSUYA |
| 分类号 |
C23C16/40;C23C16/44;C23C16/458;(IPC1-7):H01L21/68;C23L16/00 |
主分类号 |
C23C16/40 |
| 代理机构 |
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代理人 |
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| 主权项 |
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