METHOD FOR SYNTHESIZING POLYCRYSTALLINE SEMICONDUCTOR COMPOUND

摘要

PROBLEM TO BE SOLVED: To provide a method for synthesizing a III-V group polycrystalline semiconductor compound by which a reusable life of a boat for synthesis can be improved. SOLUTION: The method for synthesizing the III-V group polycrystalline semiconductor compound is said that the boat 4 with a slit 51 packed with a III group raw material is placed at one end side in a sealed tube and meanwhile a V group raw material is placed at another end side and then the sealed tube is heated in this condition. The boat 4 is comprised of belt-like notched parts 52 lengthened from the open peripheries at the both open ends of the cylindrical wall of the boat body 50 to the slit ends direction and cover parts 60 screwed at the both open ends of the boat body holding the heat-resistant film disks 70 with projection parts 71 fitted to the belt-like notched parts. COPYRIGHT: (C)2003,JPO