SEMICONDUCTOR FABRICATION APPARATUS HAVING CONFINEMENT RING

摘要

PURPOSE: A semiconductor fabrication apparatus having a confinement ring is provided to enhance the adhesive strength with a polymer and prevent the contamination of a wafer and a process chamber by forming a concavo-convex portion on a surface of a confinement ring. CONSTITUTION: A process chamber includes an upper chamber and a lower chamber in order to provide a processing area. A cathode is mounted at the upper chamber in order to be used as an electrode. A susceptor is mounted at the lower chamber corresponding to the cathode of the upper chamber. A confinement ring is installed around the cathode. The confinement ring is protruded to a lower portion of the cathode. A concavo-convex portion is formed on a surface of the confinement ring. The concavo-convex portion is formed with hemispheric patterns.