发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A semiconductor device and a method for manufacturing the same are provided to be capable of preventing the bridge between a bit line and a storage node contact, the collapse of the bit line and restraining voids of an insulating layer. CONSTITUTION: The first insulating pattern(35) is formed on a semiconductor substrate(30). A bit line(37) is formed at both sidewalls of the first insulating pattern(35). The second insulting layer is formed on the entire surface of the substrate(30) having an oxide layer(39), the first nitride layer(40) and the second oxide layer(41). A contact hole is formed to expose the substrate by selective etching of the second insulating layer and the first insulating pattern(35). A plug(43) is formed in the contact hole by filling a conductive layer, and a storage node(42) is also formed on the resultant structure.
申请公布号 KR20030043138(A) 申请公布日期 2003.06.02
申请号 KR20010074156 申请日期 2001.11.27
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HAN, DONG HUI
分类号 H01L27/10;(IPC1-7):H01L27/10 主分类号 H01L27/10
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