| 摘要 |
PURPOSE: To provide a thin film filter for optical multiplexer and demultiplexer by preventing defects, such as chips and cracks of an optical thin film, when a substrate provided with an optical thin film is cut to obtain the thin film filter for optical multiplexer and demultiplexer. CONSTITUTION: The optical thin film of the thin film filter for optical multiplexer and demultiplexer comprising a mirror layer alternately laminating materials of a high refractive index and a low refractive index, the optical thin film having a plurality of mirror layers so as to be symmetrical by sandwiching a spacer layer and a pedestal, is processed into a polygonal truncated pyramid shape by dry etching, and a cut margin part of the substrate for removing the optical thin film is cut with grindstone.
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