MICRO SWITCHING DEVICE ACTUATED BY LOW VOLTAGE

摘要

PURPOSE: A micro switching device is provided to reduce an applied voltage, to obtain a desired variation amount by a weak electrostatic force, and to prevent an adhesion phenomenon. CONSTITUTION: A spring(54) elastically operates, and a membrane(55) is formed at one end of the spring so as to be supported. A lower electrode(52) is formed at a lower part of the membrane and generates an electrostatic force according to an applied voltage. The membrane is a non-flat board type. The spring is formed at an anchor part(53) fixed at a substrate(51). The membrane is supported by the spring and operates at a noncontact state with the substrate. A signal line(56) is formed on the substrate and is contact with the membrane by driving of the membrane.