发明名称 SEMICONDUCTOR STORAGE DEVICE AND ITS MANUFACTURING METHOD
摘要 PURPOSE: To provide a semiconductor storage device having high reliability. CONSTITUTION: The semiconductor storage device comprises a silicon substrate 109 containing a p-type impurity in a first concentration, an epitaxial layer 108 formed on the substrate 109 and containing a p-type impurity in a second concentration lower than the first concentration, a storage area 191 provided on the layer 108, and a logic circuit region 192 provided at a different position from the area 191 on the layer 108. The storage area 191 includes a p-type well 105, an n-type well 113, and a bottom well 102. The logic circuit region 192 includes a complementary field effect transistor.
申请公布号 KR20030043594(A) 申请公布日期 2003.06.02
申请号 KR20020043789 申请日期 2002.07.25
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 SHINKAWATA HIROKI
分类号 H01L27/10;H01L21/8238;H01L21/8239;H01L21/8242;H01L27/02;H01L27/092;H01L27/108;(IPC1-7):H01L27/10 主分类号 H01L27/10
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