| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and a device for detecting chemical substance that can accurately calculate the deposit amount of a chemical substance even when the light amount of a transmitted infrared ray is fluctuated by a factor other than the chemical substance deposited on a substrate. SOLUTION: This detection device has an infrared transmitting substrate 10, an infrared ray source 20 for emitting the infrared ray to the infrared transmitting substrate 10 to gets incident, an infrared detector 32a for detecting the infrared ray of the first wavelength area having substantially no infrared absorption by the chemical substance deposited on the infrared transmitting substrate 10, out of the infrared rays emitted from the substrate 10 after multipath reflection in an inside of the substrate 10, an infrared detector 32b for detecting the infrared ray in the second wavelength area which is a wavelength area in the vicinity of the first wavelength area and by which the infrared absorption due to the chemical substance is generated, and arithmetic units 36a, 36b for calculating the deposit amount of the chemical substance deposited on the substrate 10 based on the infrared rays detected by the infrared detectors 32a, 32b.</p> |
