发明名称 |
CHARGED PARTICLE BEAM DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device which can easily set up conditions of WD most suitable for observation. SOLUTION: A means is provided for displaying WD most suitable for an objective of observation or moving a stage toward the WD, by specifying acceleration voltage, a sample slanting angle, and a detector to be used as minimum informations needed for the observation.
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申请公布号 |
JP2003157791(A) |
申请公布日期 |
2003.05.30 |
申请号 |
JP20010353949 |
申请日期 |
2001.11.20 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
KOGASHIWA TAKESHI;SATO MITSUGI |
分类号 |
H01J37/20;H01J37/244;H01J37/28;(IPC1-7):H01J37/28 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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