| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and a method for compensating for the nonlinearity of interferometer position data, by using a digital numerical processing operation. SOLUTION: The system and the method (200) for the compensation of the nonlinearity of the interferometer position data (202) receive a group (600) of digital position values (300). A first group of the digital position values is processed digitally (208), and a plurality of data values (210) are generated. The plurality of data values are processed digitally (212), and at least one quasi-static nonlinear parameter (214) is generated. On the basis of at least one nonlinear parameter, a second group of the digital position values is compensated for.
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