| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for efficiently performing uniform irradiation with a laser beam even when using a highly coherent laser and a large area substrate. SOLUTION: This laser irradiation device is provided with a laser, a division means for turning the laser beam emitted from the laser into a plurality of the laser beams, a formation means for synthesizing the plurality of the laser beams on or near an irradiation plane and turning them to the laser beam having cyclic energy distribution, and a relative substrate moving means to the laser beam. By using such a laser irradiation device, the entire surface of a semiconductor film can be annealed.
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