OPTICAL WAVEGUIDE DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide device which has a simple structure and is manufactured with a simple manufacturing process, is reliable and easily obtains practically sufficient athermal characteristic and to provide a method of manufacturing the device. SOLUTION: The optical waveguide device in which a waveguide layer composed of a core and a clad are formed on a substrate is characterized in that the temperature dependency of the refractive index of the core is 8×10<-6> / deg.C or smaller and the thermal expansion coefficient of the substrate is -0.3 to -3.2×10<-6> / deg.C in the temperature range from -40 to 100 deg.C.