| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of depositing an optical quality film by plasma enhanced chemical vapor deposition (PECVD) by which a desirable difference in refractive indices between adjacent films is realized. SOLUTION: The method of depositing an optical quality film by PECVD including the following steps is provided. Namely, the method includes two steps, (i) a step in which a space defined by six dimensions is created wherein five dimensions thereof correspond to five respective independent variables of which a set of four independent variables relate to the flow-rate of respective gases a plurality of kinds, a fifth independent variable relates to total pressure, and a sixth dimension relates to observed Fourier transform infrared spectroscopy (FTIR) characteristics, and (ii) a step in which an optical film is deposited while maintaining three of the set of four independent variables substantially constant as well as the fifth independent variable, and varying a fourth of the set of four independent variables to obtain desired characteristics in the sixth dimension. |
